Platform for Characterization & Tes
Electron Microscope Lab.
Scanning Probe Microscope Lab.
Structure Analysis Lab.
Photovoltaic Test center
Optic-Electronic Lab.
Spectroscopy Lab.
Computing Center
ADS:

Dushu Lake Higher Education Town, Ruoshui Road 398, Suzhou Industrial Park, Suzhou
TEL: 0512-62872554
FAX: 0512-62603079
CODE: 215125
Atomic Force Microscope  
 
Instruments:
Atomic Force Microscope
Model:
Dimension 3100
Manufacturers:
Veeco
Configuration:
- Dimension 3100 scanning head and Nanoscope IIId controller
- Samples up to 8 inch for semiconductor wafers
- Measurement area up to 6 inch
- Complete local electronic module of surface(SCM/CAFM/SSRM)
Specifications:
The same as main applications
Application:
(1) Measurement for surface morphology and composition
      - Contact and tapping modes of,0.25nm X-Y resolution and 0.05nm noise
      - Friction imaging and quantitative phase imaging
(2) EFM , MFM and KFM for local electronic properties of surface
     - Imaging of EFM and MFM
     - KFM measurement for the surface potential,10mv resolution
(3) Carrier Concentration Profiles, oxide layer defects and local electrical conductivity
     - SCM measurement for dC/dV curve to characterize the local Carrier Concentration and oxide layer defects
     - CAFM measurement for I/V curve to characterize the local conductivity of surface;   
     - Current range from 10pA-1mA,bias range from 1mV-12V.
     - SSRM measurement for surface resistance profiles to characterize the local conductivity and carrier concentration.
(4) Nanofabrication
     - Control tip motion by programs for nanofabrication and nanolithography
 
Contact us:
Zheng-hui LIU, Hai-jian ZHONG
Tel: 0512-62872550
E-mail: zhliu2007@sinano.ac.cn; hjzhong2007@sinano.ac.cn
 
 
中国科学院苏州纳米技术与纳米仿生研究所(筹) 中国科学院 中华人民共和国科学技术部 中国科学院半导体研究所 中国科学院青年联合会 苏州独墅湖高等教育区
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                                                 ADS: Dushu Lake Higher Education Town, Ruoshui Road 398, Suzhou Industrial Park, Suzhou