(1) High-Resolution x-ray diffraction( for epitaxial thin films)

      - Multi-layer thickness

      - Chemical composition

      - Relaxation

(2) X-Ray Diffraction (for poly-crystalline thin films)

      - Phase determination

      - Crystalline grain size

      - Crystallinity(ration between crystalline phase and amorphous phase)

(3) X-Ray Reflectivity

      - Multi-layer thickness

      - Density

      - Surface/interface roughness

(4) In-Plane Diffraction (for sample with prefered orientation or epitaxial thin films)

      - In-Plane orientation

      - In-Plane lattice parameter and crystallinity

      - Depth analysis

 

Yong-Xin QIU   0512-62872545   yxqiu2008@sinano.ac.cn

Kai HUANG    0512-62872554   khuang2006@sinano.ac.cn