Platform for Characterization & Tes
Electron Microscope Lab.
Scanning Probe Microscope Lab.
Structure Analysis Lab.
Photovoltaic Test center
Optic-Electronic Lab.
Spectroscopy Lab.
Computing Center
ADS:

Dushu Lake Higher Education Town, Ruoshui Road 398, Suzhou Industrial Park, Suzhou
TEL: 0512-62872554
FAX: 0512-62603079
CODE: 215125
Automatic Sputter Coater  
 
Instruments:
Automatic Sputter Coater
Model:
K550X
Manufacturers:
QUORUM, UK
Configuration:
- K550 Coater core instrument
- K250 Carbon evaporation attachment
Specifications:
- Sample stage: rotation, tilt, 50mm in diameter
- Vacuum: ATM-10-2mbar
- Target: gold (60mm in diameter×0.1mm in thickness)
- Sputter current: 0-50mA
- Sputter time: 0-4min
- Deposition speed: 0-25nm/min
- Chamber: 165mm (diameter) ×125mm (high)
- Dimensions: 450mm W x 350mm D x 175mm H
Application:
- Sputtered gold/carbon films on the surface of samples to observe non-conductive materials in the SEM
 
 
中国科学院苏州纳米技术与纳米仿生研究所(筹) 中国科学院 中华人民共和国科学技术部 中国科学院半导体研究所 中国科学院青年联合会 苏州独墅湖高等教育区
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                                                 ADS: Dushu Lake Higher Education Town, Ruoshui Road 398, Suzhou Industrial Park, Suzhou