Platform for Characterization & Tes
Electron Microscope Lab.
Scanning Probe Microscope Lab.
Structure Analysis Lab.
Photovoltaic Test center
Optic-Electronic Lab.
Spectroscopy Lab.
Computing Center
ADS:

Dushu Lake Higher Education Town, Ruoshui Road 398, Suzhou Industrial Park, Suzhou
TEL: 0512-62872554
FAX: 0512-62603079
CODE: 215125
PIPS Ion Mill  
 
Instruments:
PIPS Ion Mill
Model:
691.CS
Manufacturers:
Gatan, USA
Configuration:
- Electronic temperature controller
- Cold stage
- Dual Beam modulation
- Low energy gun function
Specifications:
- Ion guns: Two Penning ion guns
- Ion Beam Energy: 100eV to 6keV
- Milling Angle: 10º to -10º, Each gun independently adjustable
- Polishing Rate: Approximately 40um/hr for Silicon at 5keV
- Beam Modulation: Single or double sector for cross-sectioning
Application:
- Milling of TEM 3mm (D) sample to observe the structure of sample
 
 
中国科学院苏州纳米技术与纳米仿生研究所(筹) 中国科学院 中华人民共和国科学技术部 中国科学院半导体研究所 中国科学院青年联合会 苏州独墅湖高等教育区
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                                                 ADS: Dushu Lake Higher Education Town, Ruoshui Road 398, Suzhou Industrial Park, Suzhou