Platform for Characterization & Tes

	Electron Microscope Lab.
Field Emission TEM Field Emission SEM Tungsten Filament SEM Preparation Equipments
	Scanning Probe Microscope Lab.
Vecco Multimode AFM Vecco Dimension3100 AFM
	Structure Analysis Lab.
High Resolution XRD Optical Microscope Photo Cross Correlation Spectroscopy Zeta Potential Analyzer
	Photovoltaic Test center

	Optic-Electronic Lab.
Semiconductor Characterization System Manual Prober with Probeshield Hall Measurement System
	Spectroscopy Lab.
PL spectroscopy system Confocal Raman Spectroscope
	Computing Center

ADS：	Dushu Lake Higher Education Town, Ruoshui Road 398, Suzhou Industrial Park, Suzhou
TEL：	0512-62872554
FAX：	0512-62603079
CODE：	215125

Solarus Advanced Plasma System

Instruments:

Solarus Advanced Plasma System

Model:

950.M

Manufacturers:

Gatan, USA

Configuration:

- TEM adapter
- SEM sample mounting tables

Specifications:

- Multi-stage diaphragm pump and turbo-molecular drag pump
- Base pressure: 5E-6 Torr
- Operating pressure: 400mTorr
- H2/O2 and Ar/O2 recipe can be selected
- An auto-tuning RF match network and mass flow controllers
- Faster cycle rates
- Faster cleaning rates

Application:

- Offer a unique cleaning solution by virtue of a plasma recipe

- Offer a faster, more thorough cleaning of TEM/SEM sample and sample holder

- Capable of safely removing burned-on contamination

　 ADS： Dushu Lake Higher Education Town, Ruoshui Road 398, Suzhou Industrial Park, Suzhou