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ADS：
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Dushu Lake Higher Education Town, Ruoshui Road 398, Suzhou Industrial Park, Suzhou |
| TEL： |
0512-62872554 |
| FAX： |
0512-62603079 |
| CODE： |
215125 |
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| Manual Prober with Probeshield |
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Instruments: |
Manual Prober with Probeshield |
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Model: |
PS200EMC |
Manufacturers: |
SUSS |
| Configuration: |
1.Base Machine
Manual 200mm probe system for frost-free, light- tight and EMI-shielded probing on wafers up to 200mm and substrates
- Positioning stage:XY-stage with hardened rollers, movement range:200x200mm with quick movement and XY-fine adjustment with 10x10mm range through micrometer screws (500µm/rotation), each axis with individual magnetic fixation, additional overall vacuum brake
- THETA-Z-system:
Manual chuck stroke: 10mm,
THETA-fine adjustment range: ±9°
- ProbeHead platen vacuum/magnetic with manual drive (combined control knob for height adjustment and separation, height adjustment range: 30mm, separation stroke: 0.4mm)
- Specifications with the standard chuck system
- Other chucks and optional accessories may affect accuracy and movement ranges
- Dry gas purging control system for frost-free probing down to -60°C
TEST EQUIPMENT INTERFACE
- To connect (parameter) tests instruments to the ProbeShield®
- Includes 2 panels with:
4 triax-triax-dual connectors (Force&Sense),
8 coax-coax connectors
- Fits to all ProbeShield® systems
- Feedthrough connector panels for all ProbeShield systems to integrate up to 4 preamplifiers from Keithley KI6430 or KI4200 inside the ProbeShield top chambers
- Two feedthrough connector panels with altogether 4 Sub-D-feedthroughs and additionally 4 Kelvin-Triax-feedthroughs
2.Microscope System
MICROSCOPE MOVEMENT MANUAL XY 50x50mm WITH TILT
- Includes fixed microscope bridge
- Movement range: 50x50mm
- Coaxial operating knob for X and Y movement
- Includes manual tit-back microscope lift,
Z-movement range: approx. 100mm
MICROSCOPE MITUTOYO FS70Z-S COMPLETE
- Microscope body with 1x-2x zoom and coarse/fine focus rack
- Trinocular photo tube
- Objective revolver, rotary type (with 4 mounts)
- Two eyepieces: 10x
- Objectives: 2x, 10x, 20x
3.TriaxChuck
- Chuck is isolated from guard and machine
- For substrates of 10x10mm up to wafers 200mm
- Material: stainless steel
4.Probehead and Tip
- Holding fixture for AP&T probes
- Stainless steel design for high rigidity and minimum thermal drift
5.ShieldEnclosure and Vibration Isolation Platform
- W=800mm, D=800mm, H=750mm
- 3 pressure regulators
- For machines up to 250kg
- Shelf 630x420mm at the rear side |
| Specifications: |
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| Application: |
Contact us:
Taofei Zhou
Tel: 0512-62872594
E-mail: tfzhou2007@sinano.ac.cn |
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